Thousand-grade semiconductor purification workshop is a kind of purification workshop with high cleanliness. In the planning and design, we should pay special attention to some matters, and also test the experience of engineers. Today, Xiaobian will explain to you what aspects of the planning, design and construction of the standardized thousand-grade semiconductor purification workshop should be considered!
1, air cleanliness requirements: according to the air cleanliness requirements of thousand-grade semiconductor purification workshop, determine the air filtration system and air flow mode of the workshop.
2, workshop layout: according to the workshop production process and equipment layout, determine the layout of the workshop and equipment placement, in order to ensure that the air flow in the workshop is uniform and stable.
3, air filtration system: according to the workshop air cleanliness requirements, select the appropriate high efficiency filter and HEPA filter, and determine the number of filters and replacement cycle.
4, temperature and humidity control: according to the workshop production process and product requirements, determine the workshop temperature and humidity control range, and select the appropriate temperature and humidity control equipment.
5. Lighting system: According to the air cleanliness requirements of the workshop, select the appropriate dust-free lamps and lanterns, and determine the number and layout of lamps and lanterns.
6. Equipment and tools: According to the production process and product requirements of the workshop, select appropriate dust-free equipment and tools, and determine the quantity and placement of equipment and tools.
7, personnel in and out management: according to the workshop air cleanliness requirements, develop strict personnel in and out management system, and provide professional dust-free clothing and shoe covers.
8, safety management: according to the workshop production process and product requirements, develop strict safety management system, and provide the necessary safety equipment and protective measures.
9. Regularly test the air quality: according to the air cleanliness requirements of the workshop, regularly test the air quality in the workshop, and timely take necessary measures to adjust and improve.
10. Construction management: According to the planning and design of the workshop, make detailed construction management scheme, and carry out construction and acceptance in strict accordance with the scheme.
The above are the main aspects of the planning, design and construction of the standardized thousand-grade semiconductor purification workshop, which need to be designed and constructed according to the actual situation. At the same time, it is also necessary to pay attention to the maintenance and management of the workshop to ensure that the air quality of the workshop meets the requirements of dust-free.