1. Definition of clean room: Clean room is a special enclosed building built to control particulates in the air in the space. Generally speaking, the clean room will also control temperature and humidity, air flow pattern, and vibration noise and other environmental factors.
2. Particle control: The first step of particle control in the clean room is to make a complete analysis of the impact of indoor particles on the process, and then according to the analysis results, determine the appropriate particle control mode and the management mode of the clean room, so as to effectively control particle pollution. When doing particle impact analysis, special attention must be paid to the quantification of data, that is, the influence of particle size and its quantity on the process, which is useful data.
3. External pollution sources: the pollution sources that enter the system from the dust-free room are mainly imported by the air conditioning and ventilation system. In addition, cracks in doors, Windows and walls are also the causes of external pollution sources.
4. Internal pollution sources: the sources of pollution in dust-free rooms are generally process machines and operating staff, and the most serious internal pollution sources are generally operating staff.
5. Isolation: Isolation is the concept of pollution control, that is, keeping pollution sources out of dust-free areas. This concept is mostly used in high-cleanliness dust-free environment, such as Class 100, Class 10, Class 1 and other high-filter coverage dust-free rooms, or the use of mini clean rooms to cover the machine.
6. Dilution: Dilution is another concept of pollution control, which is mostly used in clean rooms with low cleanliness. For example, in the Class 10000 clean room, the particles generated by the process and personnel will rotate around the room because of the small amount of air exchange, and will take a relatively regular time to discharge. Therefore, the new clean air can only dilute the concentration of particulates in the room, keeping the cleanliness of the room below a certain level, and separating people from the process is required. When using dilution method as particle control, special attention should be paid to the correctness of particle impact analysis in article 2 of this section. Only when the generation rate of particles can be grasped, can particles be effectively diluted.
7. Air flow mode: refers to the flow field type, air flow distribution, air flow direction and other properties. Since the removal of particles is completely controlled by the airflow mode, the cleaner the clean room or dust-free area, the more attention will be paid to the control of airflow mode. Basically, you have to master the airflow pattern first to master the cleanliness.
8. Single flow type air flow: the air flow moves in the same direction. This kind of clean room is called single flow type clean room. High cleanliness clean room requires single flow type air flow.
9. Non-single flow type air flow: the direction of the air flow is not controlled, which is the so-called turbulence type clean room. The clean room with low cleanliness uses non-single flow type air flow to save cost.
10. As-built cleanroom: a cleanroom that is completed and operable with all supporting facilities complete but without equipment and personnel to operate the equipment.
11. At-rest cleanroom: a cleanroom that has been completed and operable with all relevant support facilities in action, equipment loaded and operable or in operation, 1 as specified, but without personnel to operate the equipment.
12. Operational cleanroom: an Operational cleanroom in which all relevant support facilities are Operational, equipment and personnel are loaded, and operating conditions are present to achieve its normal functions.