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ISO cleanroom load characteristics and energy savings

Popularity:5 Release time:2022-05-19 09:38:01

ISO clean room to achieve cleanliness ventilation measures requirements.

In order to achieve the cleanliness level of an ISO clean room, comprehensive measures must be taken, including process layout, building plane, building structure, building decoration, personnel and material purification, air cleaning measures, maintenance management, etc. Among them, air cleaning measures are the fundamental guarantee to achieve cleanliness. As far as air cleanliness is concerned, there are mainly the following specific measures:

(1) The air supply to the ISO clean room must be air with high cleanliness. Therefore, a high-efficiency or sub-high-efficiency filter (when the cleanliness level is low) must be selected as the final filter, and the air entering the ISO clean room must be filtered at the last stage. In order to protect the terminal filter and prolong its life, the air must first be filtered by the medium efficiency filter.

(2) According to the grade of the ISO clean room, the airflow distribution pattern of the ISO clean room should be reasonably selected, and the eddy current area should be avoided in the working area; try to make the air with high cleanliness sent into the room reach the working area directly; Particles in the ISO clean room are expelled from the return air vents.

(3) There is enough air volume, not only to dilute the dust concentration of the air, but also to ensure a stable airflow pattern.

(4) Different levels of ISO clean room, ISO clean room and non-ISO clean room or ISO clean room and outdoor should maintain a certain positive pressure value.

ISO cleanroom airflow organization considerations

1) When the product requires a cleanliness level of 100, the laminar flow type is selected; when the product requires a cleanliness level of 1000~100000, the turbulent flow type is selected.

(2) Reduce eddy currents and avoid bringing contaminants outside the working area into the working area.

(3) In order to prevent the secondary flying of dust, the airflow speed should not be too large. The return air outlet of the turbulent ISO clean room should not be located in the upper part of the work area. It is advisable to arrange the return air outlet evenly on the floor or the lower part of the side wall.

(4) The air flow in the working area should be uniform, and the flow rate must meet the requirements of technology and hygiene; the clean air flow should cover the working part as much as possible, so that the pollutants flow to the air return port before spreading.

(5) There should be a certain interval in the arrangement of the working equipment to create conditions for the arrangement of the supply and return air outlets and the smooth airflow: the influence of tall equipment on the airflow organization should be considered when designing the airflow organization.

(6) The clean workbench should not be arranged in the laminar flow ISO clean room. When arranged in a turbulent ISO clean room, it should be placed on the windward side of the airflow in the working area to improve the indoor air cleanliness.

(7) When there is a fume hood in the ISO clean room, it should be placed on the downwind side of the airflow in the working area to reduce indoor pollution.

Load characteristics and energy saving of ISO clean rooms

Under normal circumstances, the energy consumption of the purification air conditioning system is much larger than that of the general air conditioning system. The reason is that the load characteristics between the two are different. As far as ISO clean rooms, especially the ISO clean rooms of the semiconductor industry are concerned, the load characteristics are: due to the large exhaust air volume, the fresh air volume is large, so the cooling capacity required for fresh air treatment is large; the air supply volume is large, and the conveying power consumption is large. The temperature of the fan duct rises; the production equipment generates a large amount of heat and consumes a large amount of cooling capacity. The sum of these three loads generally accounts for 70% to 95% of the total load. Therefore, energy-saving measures for purifying the air conditioning system should start from reducing the fresh air volume (reducing the exhaust air volume); controlling the supply air volume (determining the number of air changes reasonably); making full use of the return air volume; selecting low-resistance and high-efficiency air-conditioning and purification equipment and variable air volume. Fans, etc. to start.

ISO clean room design requirements for production process

(1) The clean environment serves the production process, and the ISO clean room design must meet the environmental requirements of the production process, which is a matter of course. Therefore, the requirements for environmental parameters of the production process in the design of ISO clean rooms should be realistic. The area, layer height, temperature, humidity, cleanliness, etc. should be high or high, and low or low, not the higher the better. On the premise of not affecting the normal operation of the production process, the parameter requirements should be reduced as much as possible, the purification area should be controlled, the scope of the high purification level clean area should be reduced, and the area of the 100-level and higher one-way flow clean area should be strictly controlled.

(2) When zoning the production process plane, arrange the clean rooms of the same level as much as possible, set the processes with high cleanliness requirements on the windward side, and place the processes that produce dust, toxic, harmful, flammable and explosive waste gas. Equipment and containers should be placed outside the clean area as much as possible. If they must be placed in the clean area, airtight measures should be taken as much as possible to reduce the emission of dust and exhaust gas.

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